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- Place of Origin: China
- Brand Name: SIOMM
- Model Number: RTP-1100
Products Introduce:
RTP-1100 is an rapid thermal heating furnace (rapid annealing furnace) which was researched and developed by us . It is heated by infrared ray heating tube. Unique reasonable structure , furnace and tube can be moveable freely . So it can heat speedily. The diameter of the tube is 130MM, it can hold materials of 5 inches. Reaction district is in a sealed quartz to avoid polluting the specimen. The product is widely used in field of researching and producing semiconductor.
Function and feature:
1. Furnace and tube can move freely. Adopted KF quick flange sealing, only need a clamp flange the connection can be done. It is very convenient to put and take the specimen. Avoiding bolt leakage by artificial operation and reduced the ratio of heating tube damaging which caused by installation flanges;
2. Both of furnace and tube can be moved, when tube is out of chamber, the cooling fans will work. It can make the specimen heat and cool speedily.
3. Technology of vac-sorb forming alumina polycrystalline fiber from Japan, infrared ray heating tube its life has 5000hours, speed heating and the highest temperature can reach 1000℃
4. Reserved vacuum, gas road fast connection interface, could working with our vacuum system or mixed gas system.
5. Reserved 485 interface can be connected with computer by using our software, which can do real-time tracking, history recorder, output report; By built-in thermocouple, you can observe the temperature at any time.
6. Over-temperature alarm, leakage protection, ensure safe and reliable operation.
- Place of Origin: China
- Brand Name: SIOMM
- Model Number: RTP-1100
Specification:
Model | RTP-1100 |
Heating zone | Single heating zone |
Heating zone length | 200mm |
Constant heating zone length | 50mm(±2℃)；80㎜(±3℃) |
Power supply | 15KW |
Overall size | 1150×610×550mm |
Weight | About 85kg |
Chamber | Imported high pure polycrystalline alumina fiber, excellent heat preservation |
Tube | Φ140（OD）×450mm |
Available space | 5 inch |
Heat element | Infrared ray heating tube |
Thermocouple | N mode |
Temp control | The temperature control system uses artificial intelligence technology, with PID control, self - tuning function , 30 the heating and cooling program |
Seal | Stainless steel flange |
Standard vacuum | ≤50Pa（other vacuum system can be optioned） |
Working temp | ≤1050℃ |
Highest temp | 1100℃ |
Constant temp accuracy | ±1℃ |
Max.heating speed | 1100℃/min |
Recommend speed | 300℃/min |
Temp furnace Shell | 50℃（flange temp 100℃） |
Power supply | AC220V 50HZ/60HZ |
Normative parts | Sealed flanges 1 pcs, O-rings 5 pcs, quartz tube 1 pcs, pipe plug 1 pcs, crucible tongs each 1 pcs |
Optional parts | Furnace hobs; oven gloves, Mixed gas system; Low, medium and high vacuum system; All kinds of alumina crucibles; Alumina tube or quartz tube; Computer control software; Paperless recorder, etc. |